• In-lens Schottky Plus field emission electron gun
  Enhanced integration of the electron gun and low-aberration condenser lens provides higher brightness. Ample probe current is available at low accelerating voltage, supporting various capabilities from high resolution imaging to high speed elemental mapping.
• Two Series for selection Semi In-lens(Model SIL) 及 Hybrid lens(model SHL/HL), and total five model (Both SIL and SHL series provide Premium and Standard levels)
• Semi In-lens (SIL) provide voltage contrast and high C/P value
• Hybrid Lens (HL)
  The Hybrid Lens (HL), a combination of the electrostatic and magnetic field lens, supports high spatial resolution imaging and analysis of various specimens ranging from magnetic materials to insulators. And also good for EBSD and E-beam Writer application
• Neo Engine (New Electron Optical Engine)
  Neo Engine, a cutting-edge electron optical control system, achieves a significantly improved precision of automatic functions, as well as a superbly higher operability.
• Neo Action: SEM observation and EDS analysis can be automated by simply setting the analysis conditions and selecting the areas to measure
• SEM Automatic Adjustment Package: uses a dedicated sample to perform magnification calibration, beam alignment, and EDS energy calibration. Regular checks ensure the equipment remains in optimal condition.
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• New function of "SEM Center" for integrating EDS
  A newly developed operation GUI "SEM Center" fully integrates SEM imaging and EDS analysis. This powerful function provides next-generation operability and high resolution images obtained with FE-SEM.
• New "Zeromag" function
  "Zeromag", incorporated for seamless transition from optical to SEM imaging, makes it easy to locate the target specimen area.
• New LIVE-AI filter^*
  Utilizing the AI (artificial intelligence) capability, LIVE-AI filter is incorporated for a higher quality of live images. Unlike image integration processing, this new filter can display a seamless moving live image with no residual image. This unique feature is very effective for quickly searching observation areas, focusing, and stigmator adjustment.
• Scintillator backscattered electron detector (SBED) has excellent sensitivity and is useful in obtaining material contrast image at low acceleration voltage.
• Versatile backscattered electron detector (VBED) enables acquisition of characteristic images such as 3D and surface topography based on divided detection element shape (Live 3D)
• Upper Hybrid Detector, UHD, (only for SHL version) objective is highly efficient in detection electrons arising from the specimen, enabling acquisition of images with enhanced S/N ratio.
  
  *optional

Note: The SEM model selection, please refer to linkage