規格：FESEM Schottky Thermal FEG
- Gentle Beam™ for high resolution imaging at extremely low excitation voltages
- r-filter system 2nd generation for secondary electron energy filtering
- Live imaging of up to 4 detectors
- Specimen chamber for specimens with a diameter of 200 mm (8" wafer)
- A variety of connection flanges, for EDS, EBSD, CL, IR camera, etc.
- Air lock system for fast and clean specimen exchange
- Optional systems available for high specimens and wafers up to 8"
- Optionally, different specimen stages
- Newly designed, intuitive user interface, easy to operate
- SEM operation through operating panel and mouse