Features:

• Penning ion gun: High current density, more economic
• 2 independent gun tilt design: +/- 10o adjustable
• Both cutting & etching are possible
• Diaphragm & MDP dry pumping system for oil free environment
• Option site specific tool for high accuracy sample positioning.
• Option CCD: Magnification up to X 2600 for real time viewing cutting process
• Option cold stage down to -120^oC for ion sensitive sample