型號：PECS II, 685
規格：8KV, 2 target, Ar etching, film thickness monitor
- Penning ion gun: High current density, more economic
- 2 ion Gun
- Dry etching and large area for observation
- Sample tilt, rock and rotation control.
- Ar gas source for physical bombardment
- High quality ion beam coating with amorphous layer, good for high magnification observation.
- 2 candidate target for ion beam coating
- Film thickness monitor to setup end point for auto stop