Feature:

• Penning ion gun: High current density, more economic
• 2 ion Gun
• Dry etching and large area for observation
• Sample tilt, rock and rotation control.
• Ar gas source for physical bombardment 
• High quality ion beam coating with amorphous layer, good for high magnification observation.
• 2 candidate target for ion beam coating
• Film thickness monitor to setup end point for auto stop