規格：Al/Mg twin anode
This is a high-sensitivity photoelectron spectrometer for general application, with a wide analysis range from 3µm&phi to 3mmφ.
Micro Ion Gun
A highly precise ion etching gun with JEOL-unique electron optics technology.
Hybrid Input Lens System
General purpose analysis from micro area to a high area free from specimen damage is now possible, by changing the detection area as desired, instead of focusing the x-rays.
Data analysis software for surface analysis
Besides our conventional waveform separation method, new waveform separation algorithms using the actual spectrum and utilizing the standard spectrum library of XPS and AES have been incorporated. This frees operators from complicated parameter settings that require experience and expertise, making it possible for even a novice to carry out complicated chemical bonding state analysis